products > SKY VACUUM > CVD System
CVD to grow diamond and carbon films
Number:
Category: CVD System

    Application

    It is a vertical structure, high vacuum single chamber film coating equipment. Used for developing single layer film that is the diamond- like carbon film (DLC). DLC film has high infrared spectrum transmittance, high hardness, low friction coefficient and good chemical stability, can be used for antireflection film and protective film of various optical materials which plays anti-fraying, anticorrosion, anti-deliquescence and anti-oxidation effect, and suitable for mass production of  infrared lens optical manufacturers.

     

    Structure

    Film coating chamber, target electrode, RF power, solenoid coil, control power supply (CPS), vacuum pumping system, vacuum measurement system, electrical control system, gas circuit system and water circuit system.