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Clustre PECVD
Category: CVD System


    Used in growing thin-film solar cell, research of EL OEL molecular organic light emitting device film. Can be widely used in small volume production and on the scientific research on film materials by universities and research institutes.


    The system is a linear structure, consists of two organic material growing chambers, and the chambers are connected by gate valve, one of the chamber has docking interface for glove box, can inter-transfer substrate between the two independent coating system. Organic material growing chamber is consisted of vacuum chamber unit, organic evaporation source, heat resistance evaporation boat, sample transfer device, sample table, film thickness monitor, vacuum chamber lighting device and baking device etc.